Uf200 Prober Manual

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Uf200 Prober Manual

The following tools are currently being used:

Facilities for Functional Test on Integrated Circuits

288 digital channels (256 providing up to 800Mb/s datarate, 32 providing up to 1.6Gb/s)
4.1GS arbitrary waveform generator
320MS/1GHz digitizer
1x 8 channel device power supply (max 4A/channel)
2x 4 channel device power supply (max 8A/channel)
Additional software for memory test and scan test analysis
Supports manual package test and automatic wafer test (using the UF200 wafer prober)

Accretech UF200 wafer prober

Uf200ManualProber

Fully automatic wafer prober for up to 25 wafers/lot
Supports 6inch and 8inch wafers
Temperature controlled chuck, -40°C up to +125°C

256 digital channels (up to 125MHz)
4-channel Agilent power analyser
1 system configured for package test, the other system configured for wafer test

Tsk Uf200

Tsk

Accretech UF200A wafer prober

Standard chuck (not temperature controlled)

Spectral range 7.5 .. 14µm
Temperature measurement range -40°C .. 1200°C
Image size 640x480


Standard lens 1.0/30 mm

Tsk Uf200 Prober Manual

image area (30 x 23)°,

minimum distance 300mm

Microscope objective 1,0x

image (16 x 12) mm²,

Uf200 Prober Manuals

distance 50 mm, resolution 25µm
Online: up to 10 points
Offline: temperature of each pixel can be determined, additionally regions with min/max evaluation can be defined
Usage: e.g. detection of hot spots on chips (caused by shorts), thermal check of PCBs, etc